THERMAL AND RADIATION RESISTANCE OF CLUSTERS OF IMPURITY ATOMS IN SILICON

Authors

  • Z. M. Saparniyazova Karakalpak State University named after Berdakh
  • G.S. Saparniyazova Karakalpak State University named after Berdakh
  • S.A. Davletova Karakalpak State University named after Berdakh
  • E.Ya. Xojaniyazova Karakalpak State University named after Berdakh
  • G.J. Jabbarbergenova Karakalpak State University named after Berdakh

DOI:

https://doi.org/10.17605/OSF.IO/U4GV7

Keywords:

irradiation, thermal annealing, silicon, manganese, doping, cluster, Coulomb force.

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Published

2023-04-12

How to Cite

Z. M. Saparniyazova, G.S. Saparniyazova, S.A. Davletova, E.Ya. Xojaniyazova, & G.J. Jabbarbergenova. (2023). THERMAL AND RADIATION RESISTANCE OF CLUSTERS OF IMPURITY ATOMS IN SILICON. Web of Scientist: International Scientific Research Journal, 4(04), 384–390. https://doi.org/10.17605/OSF.IO/U4GV7

Issue

Vol. 4 No. 04 (2023): wos

Section

Articles