PROPERTIES OF IRON SILICIDES IN SINGLE-CRYSTAL SILICON

Authors

  • Daliev Khojakbar Sultanovich Branch of the Federal State Budgetary Educational Institution of Higher Education “National Research University MPEI”
  • Khusanov Zafarjon Murodovich Institute of Semiconductor Physics and Microelectronics at NUUz (Tashkent), Uzbekistan

DOI:

https://doi.org/10.17605/OSF.IO/UGJZ9

Keywords:

silicides, morphology, vacancy, spectrum, temperature, diffusion, composition, surface.

Abstract

This paper presents the properties of iron silicide compounds in n-type silicon. 

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Published

2023-05-30

Issue

Vol. 4 No. 5 (2023): wos

Section

Articles

License

Copyright (c) 2023 Web of Scientist: International Scientific Research Journal

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